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Chinese scientists develop flexible piezoresistive pressure sensors with zero standby power consumption
[ Instrument R & D of Instrument Network ] In recent years, flexible pressure sensor devices have attracted more and more attention from industry, academia, and research circles due to their wide application in human-computer interaction, electronic skin, and smart wearable fields. However, when the traditional flexible sensor device is applied in a real flexible substrate scene, the vertical stress along the normal direction caused by the device bending will produce a "false signal", so how to ensure the reliability and stability of the final device performance is still A very urgent need. In addition, the realization of a wider dynamic linear range is usually at the expense of device sensitivity, and vice versa, how to solve the balance between device sensitivity and dynamic linear range through structural design and material selection is still not a small one challenge.
In order to solve the above problems, Chen Ming, associate researcher of the Photonic Information and Energy Materials Research Center of the Institute of Materials Science and Technology, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, and researcher Yang Chunlei and their collaborators proposed two solutions: the limited Meta-analysis.
The researchers used traditional micro-nano processing technology, vacuum coating technology and laser scribing process to prepare polydimethylsiloxane (PDMS) / aluminum-doped zinc oxide (AZO) with a micro-round table structure on the top and a photoresist as the spacer layer (PS) and bottom interdigital electrode are flexible pressure sensors with polyimide (PI) / gold (Au). The fabricated device has a sensitivity of up to 2200 kPa-1, a dynamic linear range of up to 9.6 kPa, and excellent performance such as rise and fall response times as fast as less than 20 ms. The researchers further clarified the working mechanism and internal pressure distribution of the device under the effect of external pressure from a theoretical perspective, and explained the size of the hole diameter in the PS spacer layer, the microstructure of the conductive layer and the final device sensitivity, the dynamic linear range and the sensitivity threshold, etc. Performance relationship.
Dr. Ming Chen said: "In our previous work, the design of the rough structure greatly helped to increase the sensitivity of the pressure sensor. In this study, the layered structure and sufficient roughness of the PDMS / CB and LIG interdigitated electrodes Is used to improve the overall performance. In addition, the design of the PI isolation layer makes the device with zero power consumption under zero pressure, "
This work demonstrates a new method for manufacturing flexible pressure sensors with comprehensive performance through a low-cost process.
In addition, the researchers also designed a spacer layer based on polydimethylsiloxane (PDMS) / carbon black (CB), patterned polyimide (PI), and laser-induced graphene (LIG) High-performance interdigital electrode, flexible pressure sensor with zero standby power loss. The prepared flexible pressure sensor has high sensitivity (43 kPa-1), wide linear response range (0.4 ～ 13.6 kPa), fast response (<30 ms), long-term cyclic stability (> 1800 cycles) and in certain bending Under the condition (bending angle: 0 ～ 5 °), it also has the performance of standby zero power loss. The researchers also experimentally and theoretically studied the effect of the diameter of the PI spacer on the performance of the flexible pressure sensor. The above-mentioned work is jointly completed by He Ke, Yi Chenghan, and Hou Yuxin, who jointly train master students.