New multifunctional micro-EDM machine tool and application

Habin University of Technology 150001 Li Wenzhuo Zhao Wansheng Shengli Petroleum School 257000 Yu Yunxia Manufacturers and research institutes have commercialized and under development several kinds of micro-EDM machine tools, functional skills and typical applications, hoping to engage in the levy Developers of fine EDM machines provide valuable information.

There are several major MEMS technology manufacturing equipments in the world. The silicon plane technology is derived from the semiconductor manufacturing process. The typical generation has 10 people selective etching. This technology is suitable for integrating micro-sensor micro-actuators and micro-information processors in a small unit, which is very suitable for mass production; three kinds are derived from traditional addition technology including special addition technology; plus 1 technology, typical The generation technology can process all kinds of complex dimensional surfaces that can be processed by the silicon flat blood technology, and can process metal materials and various difficult-to-machine materials. Especially suitable for the individual processing of small and medium-sized parts, many developed countries adopt a strategy that emphasizes both. In order to give full play to their respective advantages as an important branch of MEMS manufacturing technology, the development of Xinyi's micro-EDM machine tools has received extensive attention. At present, micro-EDM machines in developed countries have some industrial applications and commercial sales stages. For example, Japan's Matsushita Seiki Swiss Amway Japan, Williams and other companies have more mature products, including 1 Musong 1 Seiki The product can be stably processed only a small hole 2, on behalf of the frontier of this field, but its price is very expensive, about 200,000 US dollars, and is listed as an embargo on China. In addition, Maori Sangwu and other scholars at the University of Tokyo's Zengze Ryuu Toyota University of Technology are also developing high-level systems or devices. The main research in this research direction is on micro-EDM. Combined with the needs of actual production, focus on micro-hole processing. For example, the industrial application and commercial sales stage of most of the squirting nozzles, such as the electric squirting of the squirting nozzle, have not been entered into the industrial application and commercial sales stage. In this respect, Nanjing University of Aeronautics and Astronautics started earlier, and it is also relatively systematic. For the first time, a micro-hole 4 with a hole diameter of only 1 and a depth-to-diameter ratio of 31 was machined. Zhanhua University developed a micro-EDM machine using a peristaltic micro-feed mechanism. Machine out the drive unit 3! In the process of realizing China's industrial modernization, the development of micro-EDM plus 1 machine with independent intellectual property rights has become me, the main task in the field of micro-fabrication, the characteristics of micro-EDM and the small size of small parts. The rigidity is low and it is difficult to process by conventional processing methods. In the electric discharge machining, the macro force of the electrode and the workpiece is very small, about several hundred milligrams to several tens of millimeters, and if it is matched with precision Servo feed mechanism and micro-energy discharge power supply, EDM is very suitable for micro-plus 1 micro-EDM technology can ensure the addition of 1 tip, and also has higher processing efficiency, which is other processing methods such as ultrasound Incomparable in machining, etc., to improve the machining accuracy of parts, the precision multi-function micro-EDM machine tool similar to the machining center is green. On this multi-function EDM plus 1 machine, from the manufacture of fine electrodes to the fine parts Processing, the electrode only needs to be sub-clamped, which can reduce the installation error caused by multiple clamping electrodes, and can be corrected by re-processing of the electrode. The system error of the machine tool and the shape error of the worn electrode can improve the machining accuracy of the part, and can also realize the functions of the electric spark wire electrode grinding process, the electric spark complex shape micro hole machining and the 屯 spark milling process. Multi-axis linkage technology. It is possible to realize complex micro-spark-shaped body-shaped body reinforcement due to the difficulty of re-clamping and positioning of micro-parts, and can also be used for on-line measurement assembly and debugging of electrochemical machining electroforming and even micro-cutting MEMS based on work requirements. In the body, to form a flexible manufacturing center of a micro-electromechanical system, the following describes several typical micro-electro-sparks plus 4 sets of functional features and examples. The addition of the Japanese Matsushita machine is a high-precision micro-EDM. Machine tool 6, is also the highest precision micro-EDM machine in commercial sales. The physical picture of the machine tool, such as the special processing research institute of Erbin University of Technology, has also developed a variety of electrode straight elements.

In order to facilitate the observation of the micromachining state, the machine is equipped with a microscope.

In addition, a wire electrode grinding unit is also available. The wire electrode grinding of the mountain plus the three parts of the seven 10 redundant 82 processing unit is composed of a two-way moving processing head and a 1-way and direction moving table. Its performance indicators 1 clothing; 82 recognition main processing unit performance index 700825 spindle motor 1 motor without code plate weight 18 find V ceramic bearing processing box size mml42 especially stroke range 2001 stroke range 50n yiifL microscope range sensing fear Add factory main unit 0 control 肀元阁2松082 machine internal composition 182 your 屯 spark discharge power supply uses only 0 micro-energy relaxation power supply, its minimum pulse energy is from 0 to 00 for the traditional EDM power supply Reduce the impact of parasitic capacitance on the process. The machine tool is made of ceramic materials, and the main parts are 182, which can be used for electric spark drilling, milling, grinding, wire electrode grinding and other EDM machining. It can stably process 13 micro-axis and 1 dozen micro-holes. The face is rough and dare to reach, 1 private 1 such as micropores and micro-seam samples. The machine tool can be used for the processing of various micro-axis-dimensional curved cavities, and is suitable for the development and production of micro-electromechanical systems such as micro-accelerometer micro-force sensor micro-nozzle!

The scanning micro-EDM machine tool developed by the three people of the new micro-electric fire-making machine tool photo features and high stiffness, etc., is used here as a micro-EDM terminal actuator. Make it scan motion.

The old 5 drawing machine tool is composed of several 16 scanning machine tools. 7 is the processing intention of the machine tool. 8 is the micro cross recess and the circular groove micro electric discharge machining electrode processed by the machine tool has 3 degrees of freedom, that is, along the 7 direction. 2 tilting movements and 1 movement along 2 directions, with various forms and various degrees of freedom for the workbench. It can process all kinds of complex micro-surface machine heads. It consists of one racking plate and one lifting device and three tilting devices. Creeping and mounting between the substrate and the platform. And divided, still joined. The 2-way movement and meaning of the platform can be achieved by adjusting the length of the swaying device. 7-way tilt. The feed retraction movement of the electrode is the telescopic composite of the three peristaltic devices. The size of the entire seven-axis is 1821 hearts. The response frequency of the heavy 6 platform is determined by the piezoelectric ceramic. Can reach 200.

Position error is less than 3 less 1 and 0.04!

Multi-functional micro-EDM machining center technology human production technology research and development center café Ding 6,0 in the case of Sumir Mill's Zhishan, 1 2000 axis cutting machine tool based on the overall improvement, the gap with developed countries Still great, especially in the industrialization of technology. Therefore, in the face of market demand, Chinese scientists and technicians should in-depth study of the technology-appropriate farmers in the market and accelerate the pace of industrial application of micro-EDM, and thoroughly research the micro-EDM technology and micro-targeted Feeding mechanism micro-sensor micro-electronic technology meter micro-medical device maple micro-actuator micro-robot and other micro-electromechanical systems are suitable for application technology. It is becoming the driving force for the development of productivity. The reason is to install a rotatable spindle head on the upper guide wire of the online cutting machine, and install a micro-wire electrode grinding device on the machine table, and the machine tool The slewing device is also installed in the clamping system of the workpiece to process a variety of complex profiles. The machining center can realize micro-cutting of the micro-wire machining center. Micro-cavity processing micro-wire electrode grinding micro-electric spark drilling and cutting The customer's micro-electro-sparking addition, because of the numerous functions of the centering, is very suitable for processing all kinds of complex profiles. The machining center is processing the tooth-thickness of a thick sheet of 5 on a 1 thick sheet. Examples of various microstructures.

Teng Changnan. The electric discharge machining method is high speed. Micro-machining, technical trends. Mechanical technology. 1988.3621825 Zhao Wansheng, Liu Weidong, Wang Zhenlong. Research on differential reciprocating miniature electric discharge machining device. Journal of Mechanical Engineering, 2000, 3696568 Li Yong, Wang Xianjun, Zhou Zhaoying and so on. The key technology of micro-EDM research is Song Xiaozhong, Liu Zhengxun. Research on the processing method of electric spark micro-holes. Electrical Addition Conclusions and Prospects Micro EDM is a very important technical means for the future manufacturing technology of MEMS. This paper introduces in detail the current merging and under development of foreign manufacturers and research institutes. The technical points and typical features of the EDM machine tool can be seen from the unique advantages of micro EDM and the broad application prospects. In recent years, although China has increasingly despised the application of micro EDM. More and more units have been developed and participated in the research, and some achievements have been made. The performance indicators of some products are very close to those of foreign products, but the National Natural Science Key Fund Project funded 599350 responsible editor Zhou Shouqing.

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